Make up the gap of China's sensor industry ecological chain

In Shanghai Jiading Industrial Zone, nearly 5,000 square meters of high-level micro-nano processing plant clean, the Shanghai Institute of Micro-technology Industry (hereinafter referred to as "ITRI") and the world's leading fabs in close cooperation to build the 8-inch " Beyond Moore "R & D pilot line, is" running "dozens of wafers.

The 8-inch "beyond Moore" R & D pilot line, which was constructed by ITRI, was officially launched to fill the gap of lack of small-batch intermediate test production line in China's MEMS sensor market.

The inauguration of the 8-inch R & D pilot line not only achieved a seamless transition from R & D to mass production, but also enriched the ecological chain of "surpassing Moore" in China, which is a key link in the competition for international industries.

Wang Xi, vice chairman of the Chinese Association for Science and Technology and an academician of the Chinese Academy of Sciences, explained that "surpassing Moore" refers not only to Moore's Law but to smaller and smaller semiconductor process sizes, but to developing non-digital, Diversified semiconductor technology and products. "Beyond Moore" will no longer be limited to relying on the size change to promote the integrated circuit manufacturing process nodes, more attention to materials, processes, structures and other multi-dimensional innovation, so as to achieve sensors and other emerging technologies "lane change overtaking."

The sensor, located at the base of the entire Internet of Things, is the gateway to data acquisition and the cornerstone of the Internet of Things. However, foundries do not want to pick, small batch pilot with nowhere to do, become China's sensor and other MEMS research institutions a common problem. Niu Jiajie, vice president and director of the 8-inch R & D pilot line said that at present, about 60% of the sensors in China rely on imports and the gap is huge. In particular, MEMS sensors are almost totally imported.

At present, in the field of "Beyond Moore", the 8-inch line of Shanghai Micro Technology Industrial Research Institute, which runs from R & D to production full-scale service, is recognized as the leading technology compared to the 6-inch production line commonly used in the industry. According to the relevant sources, the entire production line construction investment nearly 1 billion yuan, a current 3,000 square meters have been put into use.

It is reported that 8-inch R & D pilot line will focus on "beyond Moore" sensor product technology development, can fully carry out the surface, body, 3D micro-nano processing and new technology, new devices, new systems research and development, Product and Technology Features MEMS, silicon photonics, RF, silicon-based III-V family, 3D integration, MR magnetic sensing, power and biology related processes and measurement equipment are deployed. As the first advanced 8-inch R & D pilot line in China, it can not only undertake product R & D, small batch production, technical training, equipment verification and other services, which helps to improve the success rate of R & D, but also helps to achieve "beyond Moore" products and Technology from R & D to production of seamless convergence.

Youjiajie introduction, the newly built R & D pilot line, the current provisions of production capacity is about 3,000 monthly wafer production, the latter will reach 5,000. "We can support the capacity needs of users from a few hundred to a few thousand. Small orders are first hatched on the pilot line. Once the pre-market test is successful, large-volume orders can be transferred to large foundries to start mass production "


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